Exposure Systems:

ABM provides a wide variety of sizes and configurations for Stand Alone UV Exposure Systems including 4”, 6”, and 8” round/square exposure beams with Near-UV (NUV), Mid-UV (MUV) and Deep-UV (DUV) wavelengths and 350W, 500W, 1,000W or 2,000W Constant Power/Constant Intensity Controlling Power Supplies.

ABM Exposure Systems are available with external Shutter Timers, Support Stands with Light Shields, and Slide Out Drawers with Vacuum Chucks to secure/pre-align 2”, 3”, 4”, 6”, 8" wafers/substrates and Vacuum Mask Holders to secure/pre-align 2”, 2.5”, 3”, 4”, 5”, 6”, 7” or 9" masks.

Slide Out Drawer Systems controls include:

  • Substrate Vacuum On/Off
  • Contact Vacuum On/Off
  • Auto-Planarization
  • Z-axis Proximity Gap setting (0~6 mm)
  • N2 On/Off
  • N2 level adjustment
  • N2 and Vacuum gauges
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