ABM Semi-auto Mask Aligner System with Auto Alignment Model: ABM/6/350/NUV/DCCD/SA-AA (shown with 6” Lightsource, Frontside Split-field Dual CCD Camera Alignment and Semi-auto/PLC Touch Panel Control Systems) |
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Available with optional Backside Visible (BSV) or Backside Infrared (BSIR) imaging systems | ||||||||||
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